The SUSS PA 200 Semi-Automatic Prober is a very accurate and flexible probe system that is extremely simple to operate. The system provides very powerful analytical capabilities in conjunction with semi-automatic prober controls.
The Microsoft® Windows control environment has been interfaced with the PA 200, making it possible to integrate tasks and allowing several programs to be used simultaneously.
The user-friendly software makes even complex test routines easy to program, execute, store and modify.
A modular concept provides for the future - improvements and accessories are easily integrated. All SUSS PM 8 probe accessories including microscopes, probe heads, probe card adapters, Textool socket adapters, thermochucks, ultrasonic cutters and laser cutters are compatible with the PA 200.
The PA 200 prober movements and setup can be controlled either manually, under program control or by external computer by means of the IEEE 488, RS 232 or TTL interfaces.

A Brief Orientation

The operator is presented with the PA 200 control screen immediately following system initialization. The control screen is used to structure the work session and is composed of pull-down menus and three windows: control Window, Status Window and Position Window. The Control Window contains the most frequently used functions. The Status Window reports the state of the key system parameters, while the Position Window maintains the wafer stage position.
The PA 200 control screen pull-down menus provide a quick and simple command structure to specify machine operation and parameters. These menus include: File, Go, Set, Routines, Display, Microscope, IEEE, and TTL.

File: Permits the operator to save, execute and modify the wafer parameter files.

Go: Provides options for wafer and microscope stage movement.

Set: Lets the operator set the wafer stage index, the home position and orientation, the Z-axis positions, the inkers and stage accuracy compensation.

Routines: Includes the Wafer Align command to assist in wafer alignment
and the semi-automatic commands of Learn Samples, Learn Template and Demo Autoprobe. These commands provide selected die or alt die of a wafer to be programmed for probing.

Display: Allows the engineer to remove main windows from the display.

Microscope: Provides set-up and movement controls for the motorized microscope manipulator.

IEEE and TTL: Turn machine control over to an external controller.

To supplement the software control, a manual control console provides convenient joystick or pushbutton operation of all prober movements as well as controlling many other functions.

Subassemblies of the SUSS PA 200

Computer Assembly
The basic components needed to operate the PA 200 Microsoft Windows software are:

Computer: an IBM AT or AT compatible PC with an RS-485 interface, minimum
of 1 megabyte of memory, DOS 3.3 or later and Microsoft Windows 3.0.
Monitor: VGA color monitor.
Keyboard: standard AT type keyboard.
Mouse: the mouse simplifies operating the Microsoft Windows program.
Either a one or two button mouse is recommended.

Electronics Module
The Electronics Module contains the I/O circuits, magnet and motor drivers, positioning counters and comparators and power supplies, and centralizes all system interfacing. The main power switch is the only operator-associated control.

Manual Control Console
The Manual Control Console provides hands-off analytical probing. This includes operation of both the wafer and microscope stages, vacuum, inkers, microscope lift and the multifunction keys which can control the microscope illuminator, monitor video mode and other TTL driven devices. Instructions regarding the Manual Control Console are found in Section 2.8.

Mechanic Assembly
Base Frame: The base frame is a vibration dampening aluminum casting.Three
separate elements isolate the microscope, wafer stage and probe platen from each other to minimize operator influence.

Chuck Stage: The chuck stage consists of two independent platforms (X and Y) supported on precision bearings. It is DC servo motor driven and uses linear encoder closed loop positioning control. The chuck Z-hub also uses a servo motor and closed loop positioning that offers 30 mm of travel with 0.125 u.m resolution, and ± 1 ^m repeatability. The user can define load, separation, align, contact and overtravel positions. An adjustable vacuum chuck accommodates various wafer sizes.

Platen Assembly: The platen is supported by four Z axis columns containing
precision spindles and ball bearing cages. These are connected by a link chain to a platen control knob located at the front left comer of the base frame. This system provides accurate, simultaneous rotation of the four spindles, assuring completely linear platen movement.
The platen assembly provides 20 mm of adjustment and 0.1 mm of contact and separation travel. The image remains in focus even at highest magnification because the distance between the chuck and the microscope remains constant during contact/separation movements.
The platen provides a mounting surface for four probe head mounting options: full surface vacuum/magnetic, semiring mechanical SUSS-clamping, semiring vacuum/magnetic, and bolt-down microwave. Each side of the platen will accommodate either four PH 150 or PH 130 probe heads, six PH 100 probe heads or two microwave probe heads.

Microscope: The X-Y stage assembly for the microscope is supported by a rugged bridge that is independent of the stage base plate. Three microscope manipulators for rapid and accurate movements are available: 50 mm manual, 25 mm high resolution manual, and a DC servo with closed loop positioning. Microscope lift is standard on the motorized and optional with the manual manipulators.